Vacuum Valves Manufacturer VAT Release New 2004 Catalogue.
VAT is the worlds largest manufacturer of vacuum valves. Design and manufacture is based in Switzerland. A network of regional customer support, sales and distribution offices are located around the world. VAT employs around 500 people globally. Customer service is the most important focus in all activities within the company.
VAT is a well established and key supplier to the Semiconductor Industry. The main product ranges supplied within the industry are Gate Valves, Angle Valves, Adaptive Pressure Control Valves, Wafer Transfer Valves, Edge Welded Bellows and Seals.
VAT devotes a high level of resources and people to product innovation and development. With the fast technology cycles within the industry, bringing new products to the market quickly, whilst still ensuring total reliability, with the highest possible level of support is the basis on which VAT have built its excellent reputation on.
| Gate Valves: High and ultra high vacuum valves from DN16 to DN1000 and above. These valves are typically used for pump isolation or chamber to chamber isolation. | |
| Angle Valves: In the size range DN16 to DN160 and above. These valves are used in a variety of applications from gauge and backing line isolation to gas inlet systems and rough pumping. | |
| Adaptive Pressure Control Valves: A very wide range of butterfly, gate and pendulum valves for downstream pressure control. | |
| Wafer Transfer Valves: Rectangular slit valves typically used to between process chambers and load locks or robot chambers. These valves are available in a range of sizes suiting all standard wafers up to 300mm and larger on request. | |
| Edge Welded Bellows: VAT run a bellows manufacturing facility that is able to produce custom bellows to exactly meet each individual requirement. Bellows are produced to either customer drawings or VAT produced drawings. | |
| Seals: VAT has nearly 40 years experience with specifying, designing and manufacturing sealing systems. During the last few years many semiconductor processes have become significantly more aggressive in terms of seal degradation. This has led to an ever increasing number of seal compounds being available on the market. VAT has extensive experience in working with these materials. |
Contact VAT to discuss the valve and sealing requirements for your process. You will be assured of the highest quality solution with the lowest possible cost-of-ownership".
manufacture is based in Switzerland. A network of regional customer support,
sales and distribution offices are located around the world. VAT employs
around 500 people globally. Customer service is the most important focus in
all activities within the company.
VAT is a well established and key supplier to the Semiconductor Industry.
The main product ranges supplied within the industry are Gate Valves, Angle
Valves, Adaptive Pressure Control Valves, Wafer Transfer Valves, Edge Welded
Bellows and Seals.
VAT devotes a high level of resources and people to product innovation and
development. With the fast technology cycles within the industry, bringing
new products to the market quickly, whilst still ensuring total reliability,
with the highest possible level of support is the basis on which VAT have
built its excellent reputation on.
above. These valves are typically used for pump isolation or chamber to
chamber isolation.
used in a variety of applications from gauge and backing line isolation to
gas inlet systems and rough pumping.
